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      劉剛 (副總經理) 移動電話:13838461208    座機:0379-65999888  
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      聯系人:劉剛
      聯系電話:0379-65163121
      傳真號碼:0379-65163100
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      鉬鉭靶材

      鉬鉭靶材
      • 如果您對該產品感興趣的話,可以
      • 產品名稱:鉬鉭靶材
      • 產品型號:10X1430X1700
      • 產品展商:ACHEMETAL
      • 產品文檔:無相關文檔
      簡單介紹

      洛陽愛科麥擁有熱等靜壓、大型冷等靜壓、大型真空和氣體保護燒結爐、大型數控銑床和大型數控磨床等設備及成熟的生產工藝,可以批量生產平面鉬靶材、旋轉鉬靶材、平面鉬鈮靶材、旋轉鉬鈮靶材、鉬鉭靶材、平面鎢靶材、旋轉鎢靶材、鎢鈦靶材、鉻靶材等。 我公司可以生產適合4.5G、5G、6G、8G大尺寸鉬鉭靶材

      產品描述

      濺射是一種先進的薄膜材料制備技術它利用離子源產生的離子在真空中加速聚集成高速離子流轟擊固體表面離子和固體表面的原子發生動能交換使固體表面的原子離開靶材并沉積在基材表面從而形成納米或微米薄膜。而被轟擊的固體是用濺射法沉積薄膜的原材料稱為濺射靶材。鎢靶材和鉬靶材可在各類基材上形成薄膜這種濺射膜廣泛用作電子部件和電子產品如目前廣泛應用的TFT - LCD (  薄膜半導體管-液晶顯示器)、等離子顯示屏、無機光發射二極管顯示器、場發射顯示器、薄膜太陽能電池、傳感器、半導體裝置以及具有可調諧功函數CMOS(補金屬氧化物半導體)的場效應晶體管柵極等  

       

      近年來,作為LCD(液晶顯示)PDP(等離子顯示)等平面顯示器的電極和配線材料的鉬系合金靶越來越受到人們的關注。在TFt-LCD中,柵電極是一個關鍵部件,以前主要是用CrA1作為柵電極材料,隨著平面顯示器的大型化和高精度化,對材料的比阻抗要求越來越高,鉬的比阻抗和膜應力僅為鉻的12,同時,由于鉻在蝕刻過程中會產生六價態Cr,對環境和健康有害,因此現在越來越多的公司改用MoA1作為柵電極材料,這樣對鉬靶材的需求也就越來越大。在鉬靶材的應用中,鉬合金的研究也越來越多,為進一步提高純鉬在耐腐蝕性(變色)和密著性(膜的剝離),在鉬中添加VNbWTa則會使比電阻、應力及耐蝕性等各種性能更好。其中鉬鈮靶材和鉬鉭靶材已得到了廣泛使用。

       

      鉬鉭靶材批量應用于液晶面板的濺射比鉬鈮靶材晚,擁有比鉬鈮靶材更優的特性。 

      我公司可生產鉭含量為2%-10%的鉬鉭靶材

      我公司生產的大尺寸鉬鉭靶材密度可達9.9g/cm3

      愛科麥生產的鉬鉭靶材晶粒度細、組織均勻、雜質含量底、電阻率適合濺射使用。 

       

      衡量靶材的質量主要因素有 純度、致密度、晶粒尺寸及分布等。在這些方面,愛科麥投入了大量的資金和精力進行研發并取得了顯著成效。并形成了具有以下特點的生產工藝(1)選擇高純鉬粉作為原料; ( 2)獨有的成形燒結技術以保證靶材的低孔隙率并控制晶粒度; ( 3)制備過程嚴格控制雜質元素的引入。(4大尺寸鎢鉬材料的細晶軋制技術。(5對部分高要求產品采用熱等靜壓方法,*大程度地獲得了靶材的良好性能。

       

         

       

      此外,愛科麥生產近期致力于以下產品的研發并取得了突破:

      1.產品大型化  生產出了單張尺寸規格為1 430mm *1 700mm *10 mm適合于G5TFT鍍膜設備的鉬及鉬鉭靶材。對于更大的產品減少了拼接的數量。

      2.為適應市場提高靶材利用率需求,正在研發制造長度超過3米的燒結旋轉靶材,此種方法生產的鉬靶材與噴涂法相比,具有質密的優勢。

      3.新興的鎢鈦靶材的研制



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