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      離子注入用鎢零件

      離子注入用鎢零件
      • 如果您對該產品感興趣的話,可以
      • 產品名稱:離子注入用鎢零件
      • 產品型號:根據客戶圖紙
      • 產品展商:ACHEMETAL
      • 產品文檔:無相關文檔
      簡單介紹

      洛陽愛科麥難熔金屬有限公司擁有車、銑、刨、磨、電加工、加工中心等各種設備,可按用戶要求加工各種離子注入用鎢零件和離子注入用鉬零件(包含高溫鉬和TZM)。 我公司加工制作的離子注入用鎢零件具有密度高,純度高,尺寸精度好的特點。

      產品描述


      離子注入是現代集成電路制造中的一種非常重要的技術,其利用離子注入機實現半導體的摻雜,即使用鎢絲作為陰極發射電子轟擊含有特定的雜質元素的氣體分子,產生電離的特定雜質原子經靜電場加速后打到硅單晶圓片表面,并打入半導體內部,改變導電特性并*終形成晶體管結構。

       

      由于在離子轉換為電漿離子時,會產生2000℃以上的工作溫度,離子束噴發時,也會產生很大的離子動能,一般金屬會很快燒熔,因此需要質量密度較大的惰性金屬,以維持離子束噴發方向,并增加組件耐用度,鎢鉬是必選材料。由于鎢鉬材料高溫化學性質穩定、熱變形小和使用壽命長等優點,因此半導體行業離子注入機離子源件及耗件多采用鎢、鉬材料制造,這些器件包括發射電子陰極的屏蔽筒、發射面板、中心固定桿、起弧室內的絲極板等,我們統稱為離子注入用鎢零件和離子注入用鉬零件

       

      離子注入用鎢零件所用材料經過對傳統鎢鉬材料工藝進行優化,包括細晶化、合金化處理,真空燒結和熱等靜壓燒結致密化,二次晶粒細化控軋技術,普遍提高傳統鎢鉬材料的壽命、耐高溫及抗蠕變性能

       

      我公司生產的離子注入用鎢零件晶粒度細化,相對密度≥99%高溫力學性能指標比普通鎢材料明顯提高使用壽命也明顯延長

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